Mr. Tetsuhiko Mizusaka Profile

Tetsuhiko Mizusaka

at Mitsubishi Gas Chemical Co Inc

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Publications (1)

Proceedings Article | 20 March 2015 Paper

Evaluation of novel lactone derivatives for chemically amplified EUV resists

Hiroyasu Tanaka, Tetsuhiko Mizusaka, Hiroyuki Tanagi, Kikuo Furukawa, Hiroki Yamamoto, Takahiro Kozawa

Proceedings Volume 9425, 94251R (2015) https://doi.org/10.1117/12.2083755

KEYWORDS: Extreme ultraviolet lithography, Polymers, Line edge roughness, Extreme ultraviolet, Lithography, Photoresist materials, Optical lithography, Diffusion, Statistical modeling, Photopolymers

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