Dr. Theodorus T. M. van Schaijk Profile

Dr. Theodorus T. M. van Schaijk

at ASML Netherlands BV

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 26 May 2022 Presentation + Paper

Fast and robust overlay metrology from visible to infrared wavelengths using dark-field digital holographic microscopy

C. Messinis, T. T. van Schaijk, N. Pandey, V. Tenner, A. Koolen, S. Witte, J. de Boer, A. den Boef

Proceedings Volume 12053, 120530B (2022) https://doi.org/10.1117/12.2604201

KEYWORDS: Overlay metrology, Digital holography, Diffraction, Sensors, Infrared radiation, Diffraction gratings, Holography, Visible radiation, Cameras, Image sensors

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SPIE Journal Paper | 14 February 2022

Diffraction-based overlay metrology from visible to infrared wavelengths using a single sensor

Theodorus T. van Schaijk, Christos Messinis, Nitesh Pandey, Armand Koolen, Stefan Witte, Johannes de Boer, Arie Den Boef

JM3, Vol. 21, Issue 01, 014001, (February 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.1.014001

KEYWORDS: Overlay metrology, Sensors, Infrared radiation, Visible radiation, Cameras, Holograms, Digital holography, Infrared sensors, Semiconducting wafers, Infrared imaging

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Proceedings Article | 20 June 2021 Presentation + Paper

Fast and robust diffraction based overlay metrology using dark-field digital holographic microscopy

T. T. M. van Schaijk, C. Messinis, N. Pandey, V. T. Tenner, A. Koolen, S. Witte, J. F. de Boer, A. J. den Boef

Proceedings Volume 11782, 117820O (2021) https://doi.org/10.1117/12.2591989

KEYWORDS: Overlay metrology, Digital holography, Diffraction, Microscopy, Holography, Diffraction gratings, Metrology, Process control, Optical lithography, Inspection

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