Taking laser ablation and laser chemical machining as examples, this paper explores the challenges to implement the energy-based approach of process signature in laser micro processing. It is expected that laser processes and specific materials independent mechanisms can be found, which are deeper causes of the generation of the surface integrity behind the interactions among the specific energy sources, mediums, surface, subsurface, base material and environment. With the aim of dealing with the challenges, this paper discusses a new point of view, cumulation of modifications, concerning more effects in laser micro processing.
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