Ms. Tongyao Li Profile

Tongyao Li

at Osaka university

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 17 April 2020 Paper

Laser parameters dependence of pulse laser surface treatment of silicon

Tongyao Li, Yao Ma

Proceedings Volume 11455, 114554U (2020) https://doi.org/10.1117/12.2564989

KEYWORDS: Silicon, Semiconductor lasers, Crystals, Laser crystals, Laser energy, Pulsed laser operation, Temperature metrology, Optical simulations, Crystallography, Laser surface treatment

Read Abstract +

With the development of laser technology, the application range of strong lasers has expanded from the scientific field to the fields of industry, national defense and military, which has become an important pillar of contemporary new technology. The interaction between laser and matter makes people understand and analyze the properties of the target, which promotes the nature of materials in contemporary science. Silicon is a good semiconductor material that can be used as a base material and a conductive material for optical devices. Single crystal silicon is susceptible to damage such as cracking, melting, and ablation under the action of laser light. The main reason is that the single crystal silicon material absorbs the laser energy, causing the internal temperature distribution to be uneven, thereby affecting the surface properties of the silicon. Therefore, in this paper, the temperature changes generated by the silicon surface under different incident laser energies, different beam radius, and different pulse length. Theoretically based on thermal conduction theory, elastic mechanics theory, using COMSOL Multiphysics to obtain: 3D-simulation model obtained by interaction of laser and silicon under different conditions. The data was sorted and analyzed by Origin to obtain the variation of silicon surface temperature under different conditions. The silicon surface temperature changes were investigated for different incident laser energies, different pulse lengths, and different beam radius. Through the data summary law, further explore the relevant properties and application directions of inorganic non-metals.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years