CONFERENCE PROCEEDINGS
Advanced Search
Tsutomu Kikuchi
at Shibaura Mechatronics Corp
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 14 October 2011 Paper
Study on EUV photomask resist stripping and cleaning
Tsutomu Kikuchi, Yuji Nagashima, Haruka Nakano, Takahiko Wakatsuki, Kensuke Demura, Yoshiaki Kurokawa, Mikio Nonaka
Proceedings Volume 8166, 81662Q (2011) https://doi.org/10.1117/12.899281
KEYWORDS: Ruthenium, Extreme ultraviolet, Photomasks, Photoresist processing, Reflectivity, EUV optics, Scanning electron microscopy, Image processing, Optical damage, Oxidation
Proceedings Article | 27 May 2010 Paper
Two-fluid cleaning technology for advanced photomask
Yuji Nagashima, Koichi Higuchi, Tsutomu Kikuchi, Yoshiaki Kurokawa, Harumichi Hirose, Mikio Nonaka
Proceedings Volume 7748, 77480Z (2010) https://doi.org/10.1117/12.867980
KEYWORDS: Liquids, Particles, Photomasks, Spherical lenses, Mask cleaning, Contamination, Mechatronics, Semiconductors, Optical properties, Velocity measurements
Proceedings Article | 11 May 2009 Paper
Two-fluid cleaning technology for advanced photomask
Tsutomu Kikuchi, Nobuo Kobayashi, Yoshiaki Kurokawa, Harumichi Hirose, Mikio Nonaka
Proceedings Volume 7379, 73791Y (2009) https://doi.org/10.1117/12.830602
KEYWORDS: Photomasks, Particles, Liquids, Electronic components, Manufacturing, Mask cleaning, Water, Mechatronics, Velocity measurements
Proceedings Article | 19 May 2008 Paper
Application of two-fluid nozzles for advanced photomask cleaning process
Kenji Masui, Tetsuo Takemoto, Kyo Otsubo, Mari Sakai, Tomotaka Higaki, Hidehiro Watanabe, Tsutomu Kikuchi, Yoshiaki Kurokawa
Proceedings Volume 7028, 702809 (2008) https://doi.org/10.1117/12.793018
KEYWORDS: Particles, Photomasks, Mask cleaning, Liquids, Mechatronics, Velocity measurements, Phase measurement, Cavitation, Quartz
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top