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Wenbo Jiang
at Institute of Optics and Electronics CAS
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Publications (2)
Proceedings Article | 18 May 2009 Paper
Study on laser direct writing system for 32nm node
Wenbo Jiang, Song Hu, Yong Yang, Lixin Zhao, Wei Yan, Shaolin Zhou, Wangfu Chen
Proceedings Volume 7284, 72840C (2009) https://doi.org/10.1117/12.832070
KEYWORDS: Laser systems engineering, Lithography, Control systems, Computing systems, Photomasks, Silica, Zone plates, Image resolution, Optics manufacturing, Structural design
Proceedings Article | 12 January 2009 Paper
Design of nano-lithographic system based on phase photon sieve
Wenbo Jiang, Song Hu
Proceedings Volume 7133, 71333U (2009) https://doi.org/10.1117/12.807078
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