Mr. Xianhao Peng Profile

Xianhao Peng

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Publications (2)

Proceedings Article | 17 August 2023 Paper

Thick-mask optimization based on particle swarm optimization algorithm

Jinwei Pan, Shuang Xu, Xianhao Peng

Proceedings Volume 12757, 127570C (2023) https://doi.org/10.1117/12.2690171

KEYWORDS: Particle swarm optimization, Source mask optimization, Extreme ultraviolet lithography, Particles, Film thickness, 3D mask effects, Reflection, Detection and tracking algorithms, 3D modeling, Resolution enhancement technologies

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Proceedings Article | 1 August 2023 Paper

EUV photomask defect detection based on image segmentation

Xianhao Peng, Shuang Xu, Yichen Zhao

Proceedings Volume 12747, 127470Z (2023) https://doi.org/10.1117/12.2689144

KEYWORDS: Photomasks, Image segmentation, Extreme ultraviolet, Defect detection, Neural networks, Image processing, Printing, Machine learning, Feature fusion

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