Existing auto-focusing methods in laser processing typically include two independent modules: surface detection and z-axis adjustment. The latter is mostly implemented by mechanical z-stage motion, which is up to three orders of magnitude slower than the lateral processing speed. To alleviate this processing bottleneck, we developed a single-lens approach, using only one high-speed z-scanning optical element, to accomplish both in-situ surface detection and focus control quasi-simultaneously in a dual-beam setup. Our approach provides instantaneous surface tracking by collecting position information and executing focal control both at 140-350 kHz, which significantly accelerates the z-alignment process and offers great potential for enhancing the speed of advanced manufacturing processes in three-dimensional space.
Multi-focal beam shaping can enhance laser processing throughput by increasing the number of processing sites and lowering processing time. This paper implements multi-focal beam shaping by adopting a tunable acoustic gradient of index (TAG) lens, which scans the focal position in the axial direction at 140 kHz. When the laser is synced with the corresponding phases of the TAG lens, multiple focal spots can be selected, allowing for ultrafast and flexible multi-focal modulation without physically moving any optics. We further characterize the tuning parameters of the TAG lens, such as its frequency, amplitude, and phase, and demonstrate the dual-focal marking on both sides of a glass slide in a single lateral scan.
One of the key performance factors of the laser machining of materials is the efficiency. The extension of the depth of field increases the machining rate, especially on non-flat surfaces. Previous work from our group successfully implemented a novel, vari-focal liquid lens (TAG lens) for the ultrafast z-scanning in laser micro-machining. It was showed experimentally and theoretically that the micro-machining efficiency of silicon and polyimide can be improved over a range of defocus distance. In this presentation, we present a numerical simulation of laser thermal ablation with ultrafast z-scanning using COMSOL Multiphysics. The model includes absorption of laser radiation, heat transfer in solid, deformed geometry for materials removal, and random sampling of focal positions. This simulation not only shows the transient response of the laser-material interaction, but accounts for some of the complexities simplified by the theoretical model. Therefore, it exhibits better estimation of the ablation rate in a real system. In addition, to demonstrate the improved machining efficiency on non-flat surfaces, we design an experiment of laser machining on roughened silicon to compare the z-scanning machining system with the conventional machining system. The numerical model is shown to be consistent with the experiment result.
A continuously growing interest to achieve highly efficient mass-production systems has catalyzed various developments in high-efficiency laser processing techniques. These techniques entail fast and cost-effective control of the laser beam position for high-throughput laser material processing with optimal efficiency. Tunable acoustic gradient (TAG) lens is a device that uses acoustic waves to radially excite a fluid-filled cylindrical cavity that allows ultra-fast variation in focal-length. By rapidly scanning the laser focal point along the optical axis, TAG lens enables rapid selection of the focal length on time scales shorter than 1μs and can provide an increased efficiency in the machining rate. In this presentation, we demonstrate how a TAG lens can be used to achieve high-throughput material processing. Previously we have shown that the TAG lens enables higher micromachining rates in various material systems. In a specific example of silicon, we achieve a nearly threefold increase in the machining rate while maintaining sharp side walls and a small spot size. Through a detailed analysis of taking the probability distribution of the optical scanning range into account we study how using TAG lens with various micromachining rates affect the material processing efficiency.
Drop-on-demand jet-based printing and deposition techniques benefit from increased printing resolution compared to inkjet printing. In this study, we present two sets of methods to improve the printing resolution and decrease the laser transfer threshold energy for blister-actuated laser-induced forward transfer (BA-LIFT). In one technique, we examine the steady meniscus formation by fabricating micrometer-sized holes onto the solid polyimide thin film substrate which hosts the donor liquid ink film to be printed. Due to the micrometer size of holes, surface tension effects are enhanced, a steady meniscus is formed at the air-ink interface, and the resulting focused jets are thinner and faster than regular jets. In the other set of techniques, we examine the transient meniscus formation by using Faraday waves to induce a transient meniscus at the air-ink interface. We show that focused jets may have different features compared to regular jets depending on the focusing method. We demonstrate experimentally and computationally that steady and transient meniscus formation enable jetting at lower laser pulse energies and leads to the ejection of smaller droplets.
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