Dr. Yan Shen
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 12 October 2016 Paper
Yan Shen, Peng Zhou, David Wei Zhang
Proceedings Volume 9818, 98180P (2016) https://doi.org/10.1117/12.2246592
KEYWORDS: Graphene, Oxides, Plasma, Transistors, Etching, Raman spectroscopy, Atomic force microscopy, Field effect transistors, Silicon, Argon

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