Mr. Yu-Cheng Chang Profile

Yu-Cheng Chang

at Powerchip Semiconductor Manufacturing Corp

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Publications (1)

Proceedings Article | 27 March 2017 Presentation + Paper

A novel methodology for litho-to-etch pattern fidelity correction for SADP process

Shr-Jia Chen, Yu-Cheng Chang, Arthur Lin, Yi-Shiang Chang, Chia-Chi Lin, Jun-Cheng Lai

Proceedings Volume 10146, 101460N (2017) https://doi.org/10.1117/12.2258201

KEYWORDS: Lithography, Photoresist materials, Etching, Optical proximity correction, Resolution enhancement technologies, Photomasks, Semiconductors, Source mask optimization, Double patterning technology, Semiconducting wafers, Radon, Computer simulations

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