Mr. Yu-Sheng Yang Profile

Yu-Sheng Yang

at National Tsing Hua Univ

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Proceedings Article | 22 January 2005 Paper

Design and fabrication of pitch-tunable blaze grating

Yu-Sheng Yang, Cheng-Hsien Liu

Proceedings Volume 5717, (2005) https://doi.org/10.1117/12.590020

KEYWORDS: Diffraction gratings, Reflectivity, Actuators, Aluminum, Optical design, Diffraction, Photomasks, Lithography, Etching, Oxides

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A novel microelectromechanical grating with both pitch and blaze angle tuning functions has been designed, simulated, and fabricated and is reported in this paper. This grating device could change spectrum angle through adjusting grating pitch and make reflection match with a particular diffraction order by the blaze angle tuning. This grating could have better dispersion efficiency than most previous tunable gratings because of its small grating pitch. Besides, the reflective surfaces of our MEMS grating are constructed by surface-micromachining aluminum to get high reflective efficiency. For wide tuning range, this grating uses bulk actuators to provide large displacement of about 70um for tuning more than 1/10 of original pitch length. All tuning functions are operated by electrostatic force with a driving voltage below 120V.

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