Dr. Yuhe Li Profile

Dr. Yuhe Li

at Tsinghua Univ

SPIE Involvement:

Author

Proceedings Article | 3 October 2008 Paper

Error analysis of frequency mixing on heterodyne interferometry detecting device for superfinish surface scratch

Haoshan Lin, Yuhe Li, Dongsheng Wang, Mei Liu

Proceedings Volume 7155, 71552P (2008) https://doi.org/10.1117/12.814599

KEYWORDS: Polarization, Laser sources, Phase measurement, Heterodyning, Interferometry, Error analysis, Photodiodes, Mirrors, Beam splitters, Signal detection

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Proceedings Article | 3 October 2008 Paper

Study on topography measurement of ultra-smooth surface

Yuhe Li, XiaoLei Tong, Haoshan Lin, Huiyu Li, Qingxiang Li

Proceedings Volume 7155, 71552J (2008) https://doi.org/10.1117/12.814593

KEYWORDS: Image processing, Phase shift keying, Phase shifts, Prisms, Microscopes, Modulation, Image analysis, Visualization, Geodesy, Lithium

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Proceedings Article | 13 October 2006 Paper

Deep submicro flying height measuring technologies system

Yuhe Li, Liang Wang, Qingxiang Li

Proceedings Volume 6280, 62800O (2006) https://doi.org/10.1117/12.716170

KEYWORDS: Image filtering, Interferometry, Image processing, Visualization, Refractive index, Digital filtering, Sensors, Charge-coupled devices, Edge detection, Near field optics

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Proceedings Article | 19 May 2006 Paper

Development of user-friendly software for the roughness measurement of ultra smooth surface

Huiyu Li, Yuhe Li, Qingxiang Li, Xiaohua Liao, Jinglin Zheng

Proceedings Volume 6150, 61502I (2006) https://doi.org/10.1117/12.676898

KEYWORDS: Software development, OpenGL, Image processing, 3D displays, Visualization, Surface roughness, Statistical analysis, Interferometers, Image acquisition, Control systems

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Proceedings Article | 21 March 2006 Paper

Design and analysis on micro-worktable using novel symmetric flexure hinge based on micro-assembly

Ruiling Duan, Yuhe Li, Qingxiang Li, Juan Gong

Proceedings Volume 6040, 60400F (2006) https://doi.org/10.1117/12.664150

KEYWORDS: Finite element methods, Microelectromechanical systems, Device simulation, Inductance, Analytical research, Actuators, Photography, Microsystems, Pollution control, Reliability

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SPIE Journal Paper | 1 November 2004

Experimental study on the measurement of micro structures

Qingxiang Li, Yuhe Li, Boxiong Wang, Shifu Xue

OE, Vol. 43, Issue 11, (November 2004) https://doi.org/10.1117/12.10.1117/1.1795261

KEYWORDS: Microscopes, Integrated circuits, Imaging systems, Diffraction, Silicon, Image processing, Image quality, Metrology, Calibration, Optical engineering

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Proceedings Article | 9 September 2004 Paper

Research on control scheme in high-density multiwavelength optical disc mastering

Yuhe Li, Qingxiang Li, Dapeng Zhao, Sheng Li, Peijun Jiang

Proceedings Volume 5380, (2004) https://doi.org/10.1117/12.556701

KEYWORDS: Control systems, Optical discs, Digital signal processing, Computing systems, System on a chip, Logic, Ferroelectric materials, Optical storage, Servomechanisms, Signal processing

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Proceedings Article | 2 September 2003 Paper

Study on lateral dual-element electron tunneling accelerometer

Yuhe Li, Qingxiang Li, Zhifeng Long, Yanyang Zi, Dapeng Zhao, Yangkuan Guo

Proceedings Volume 5253, (2003) https://doi.org/10.1117/12.521359

KEYWORDS: Electrodes, Sensors, Finite element methods, Systems modeling, Metals, Distortion, Silicon, Lithium, Structural design, Teeth

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Proceedings Article | 17 September 2002 Paper

Design of alignment and positioning structure in huge-capacity optical storage system

Yuhe Li, Qingxiang Li, Yanyang Zi, Dapeng Zhao, Lifen Bai

Proceedings Volume 4930, (2002) https://doi.org/10.1117/12.483288

KEYWORDS: Optical storage, Optical discs, Optical alignment, Computing systems, Data storage, Distortion, System integration, Near field optics, Integrated optics, Optical arrays

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Proceedings Article | 17 September 2002 Paper

Measurement of dynamic properties of optical disk cluster drive using virtual instruments

Yanyang Zi, Dapeng Zhao, Qingxiang Li, Yuhe Li

Proceedings Volume 4930, (2002) https://doi.org/10.1117/12.483370

KEYWORDS: Optical discs, LabVIEW, Head, Optical storage, Digital video discs, Dynamical systems, Computer programming languages, Computer programming, Data processing, Data storage

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Proceedings Article | 17 September 2002 Paper

Development of real-time method to measure SIL-DISK spacing for superlow-flying system

Dapeng Zhao, Yanyang Zi, Qingxiang Li, Lifen Bai, Yuhe Li

Proceedings Volume 4930, (2002) https://doi.org/10.1117/12.483350

KEYWORDS: Capacitance, Near field, Data storage, Sensors, Near field optics, Reflection, Time metrology, Refractive index, Optical discs, Optical testing

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Proceedings Article | 17 September 2002 Paper

New control scheme in high-density optical disk mastering system

Sheng Li, Yuhe Li, Yanyang Zi, Qingxiang Li, Jianzhong Gu, Linglong Huang

Proceedings Volume 4930, (2002) https://doi.org/10.1117/12.483307

KEYWORDS: Optical storage, Control systems, Optical discs, Digital video discs, Compact discs, Optical tracking, Computing systems, Control systems design, Lithium, Computer networks

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SPIE Journal Paper | 1 May 2001

Optical profilometer based on the principle of differential interference

Qingxiang Li, Hong Gao, Shifu Xue, Yuhe Li

OE, Vol. 40, Issue 05, (May 2001) https://doi.org/10.1117/12.10.1117/1.1359794

KEYWORDS: Profilometers, Microscopes, Radium, CCD cameras, Turbulence, Optical testing, Wave plates, Imaging systems, Computing systems, Prisms

Showing 5 of 13 publications

Conference Committee Involvement (1)

Symposium Organizing Chairs and Committee

14 October 2002 | Shanghai, China

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