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Yura Chung
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 22 November 2023 Poster + Presentation
Teron 647e next-generation system for advanced EUV mask inspection
Priyank Jain, Dongxue Chen, Eric Kwon, Harry Huang, JiUk Hur, Yura Chung, Sieun Jang, JuHyoung Lee, Paul Chung
Proceedings Volume PC12751, PC1275106 (2023) https://doi.org/10.1117/12.3007591
KEYWORDS: Inspection, Extreme ultraviolet, Databases, Reticles, Algorithm development, Logic, Extreme ultraviolet lithography, Design and modelling, Systems modeling, Optical proximity correction
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