Mr. Zhiguo Han Profile

Zhiguo Han

at Hebei Semiconductor Research Institute

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 18 November 2019 Paper

Zhiguo Han, Faguo Liang, Suoyin Li, Yanan Feng, Xiaodong Zhang

Proceedings Volume 11189, 111890N (2019) https://doi.org/10.1117/12.2539090

KEYWORDS: Standards development, Semiconductors, Silica, Reliability, Silicon, Semiconducting wafers, Thermal oxidation, Very large scale integration

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