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Zhongyang Hao
at Harbin Institute of Technology
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Publications (1)
Proceedings Article | 31 January 2013 Paper
Design of a synchronization control system for lithography based on repetitive control method
Zhongyang Hao, Guiyong Peng, Xin Li, Xinglin Chen
Proceedings Volume 8759, 875935 (2013) https://doi.org/10.1117/12.2018740
KEYWORDS: Reticles, Control systems, Semiconducting wafers, Lawrencium, Control systems design, Lithography, Signal processing, Motion controllers, Lithium, Error analysis
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