PROCEEDINGS VOLUME 4175
MICROMACHINING AND MICROFABRICATION | 18-21 SEPTEMBER 2000
Materials and Device Characterization in Micromachining III
Editor Affiliations +
IN THIS VOLUME

6 Sessions, 20 Papers, 0 Presentations, 0 Posters
MICROMACHINING AND MICROFABRICATION
18-21 September 2000
Santa Clara, CA, United States
Measurement Techniques I
Proceedings Volume Materials and Device Characterization in Micromachining III, (2000) https://doi.org/10.1117/12.395604
Proceedings Volume Materials and Device Characterization in Micromachining III, (2000) https://doi.org/10.1117/12.395611
Thomas Hantschel, Stefan Slesazeck, N. Duhayon, Mingwei Xu, Wilfried Vandervorst
Proceedings Volume Materials and Device Characterization in Micromachining III, (2000) https://doi.org/10.1117/12.395612
Measurement Techniques II
Thomas Hantschel, Uwe Pape, Stefan Slesazeck, Philippe Niedermann, Wilfried Vandervorst
Proceedings Volume Materials and Device Characterization in Micromachining III, (2000) https://doi.org/10.1117/12.395613
Proceedings Volume Materials and Device Characterization in Micromachining III, (2000) https://doi.org/10.1117/12.395614
Jens Mueller, Jan G. Korvink
Proceedings Volume Materials and Device Characterization in Micromachining III, (2000) https://doi.org/10.1117/12.395615
Materials Characterization
Ioannis Chasiotis, Wolfgang G. Knauss
Proceedings Volume Materials and Device Characterization in Micromachining III, (2000) https://doi.org/10.1117/12.395616
W. Merlijn van Spengen, Ingrid De Wolf, Bob Puers
Proceedings Volume Materials and Device Characterization in Micromachining III, (2000) https://doi.org/10.1117/12.395617
Y. Jun, V. Boiadjiev, R. Major, Xiao-Yang Zhu
Proceedings Volume Materials and Device Characterization in Micromachining III, (2000) https://doi.org/10.1117/12.395598
High-Aspect-Ratio Processing
Yohannes M. Desta, Georg Aigeldinger, Kevin J. Zanca, Philip J. Coane, Jost Goettert, Michael C. Murphy
Proceedings Volume Materials and Device Characterization in Micromachining III, (2000) https://doi.org/10.1117/12.395599
Device Characterization
W. Merlijn van Spengen, Ingrid De Wolf, Roy Knechtel
Proceedings Volume Materials and Device Characterization in Micromachining III, (2000) https://doi.org/10.1117/12.395600
Chee How Wong, M. J. Tan, Li Hui Guo, J.-M. Huang, Kim Miao Liew, Ai Qun Liu
Proceedings Volume Materials and Device Characterization in Micromachining III, (2000) https://doi.org/10.1117/12.395601
Xavier Lafontan, Christian Dufaza, Michel Robert, Guy Perez, Francis Pressecq
Proceedings Volume Materials and Device Characterization in Micromachining III, (2000) https://doi.org/10.1117/12.395602
S. Rajendran, Kim Miao Liew, Yee Chong Loke, Ai Qun Liu
Proceedings Volume Materials and Device Characterization in Micromachining III, (2000) https://doi.org/10.1117/12.395603
Poster Session
Tim K. Shia, Shih-I Yang, Cheng-Kuo Lee, Chih-Min Yao, Mark H. Lee
Proceedings Volume Materials and Device Characterization in Micromachining III, (2000) https://doi.org/10.1117/12.395605
Tarik Bourouina, Amalia Garnier, Hiroyuki Fujita, Jean-Claude Peuzin
Proceedings Volume Materials and Device Characterization in Micromachining III, (2000) https://doi.org/10.1117/12.395609
Yi-mang Chou, Weileun Fang
Proceedings Volume Materials and Device Characterization in Micromachining III, (2000) https://doi.org/10.1117/12.395610
Measurement Techniques I
David J. Bishop, Vladimir A. Aksyuk, Cristian A. Bolle, C. Randy Giles, Flavio Pardo, James A. Walker
Proceedings Volume Materials and Device Characterization in Micromachining III, (2000) https://doi.org/10.1117/12.395606
Proceedings Volume Materials and Device Characterization in Micromachining III, (2000) https://doi.org/10.1117/12.395607
Laurent Dellmann, Terunobu Akiyama, Danick Briand, Sebastien Gautsch, Olivier T. Guenat, Benedikt Guldimann, Philippe Luginbuhl, Cornel Marxer, Urs Staufer, et al.
Proceedings Volume Materials and Device Characterization in Micromachining III, (2000) https://doi.org/10.1117/12.395608
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