Polarimetric microscopy of engineered scatterers in photonic integrated circuits

Thomas G. Brown; Tyler Howard

doi:10.1117/12.2617656

2 March 2022 Polarimetric microscopy of engineered scatterers in photonic integrated circuits

Thomas G. Brown, Tyler Howard

Proceedings Volume PC11966, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXIX; PC1196609 (2022) https://doi.org/10.1117/12.2617656
Event: SPIE BiOS, 2022, San Francisco, California, United States

Abstract

Quantitative measurements of the polarization state of light at various points within a photonic integrated circuit is a challenging but important problem in the packaging and testing of photonic systems. We analyze and experimentally test polarimetric microscopy of several types of engineered subwavelength scatterers designed for use in a silicon photonics foundry process.

Conference Presentation

Citation Download Citation

Thomas G. Brown and Tyler Howard "Polarimetric microscopy of engineered scatterers in photonic integrated circuits", Proc. SPIE PC11966, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXIX, PC1196609 (2 March 2022); https://doi.org/10.1117/12.2617656

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