In this contribution we focus on micro-machining of several materials in different processing regimes. The temporal energy deposition is influenced during operation on a femto- up to a microsecond timescale. Using an off-axis microscope, we present camera image sequences automatically obtained during the ablation process, capturing the surface changes during machining, and revealing spatially and temporally resolved developments. This aids in further process understanding such as parameter dependencies and critical process regimes (formation of unwanted surface morphologies). To optimize both productivity and quality, combined processes with successive parameter sequences are demonstrated, enabled by fast and controlled intra-process pulse parameter switching.
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