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30 April 2023 Inkjet printing for additive manufacturing, semiconductors and other applications
Michael Doran, Kai Keller, Antonio Schmidt
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Proceedings Volume PC12497, Novel Patterning Technologies 2023; PC1249702 (2023) https://doi.org/10.1117/12.2662917
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States
Abstract
Drop-on-demand (DoD) inkjet printing for the application of functional material is widely used in many industries, and is increasingly used in the manufacture of electronic devices. The main reason for using inkjet is typically the desire for a digitally controllable process that applies materials exactly where they are needed, and in the exact amount that is needed. The process is always additive and thus generates no waste. It also enables completely new applications, for example, when different materials are to be applied to a substrate or when a property gradient is to be generated on a substrate by applying a mixing gradient of two materials. In our presentation we will show very different examples from the semiconductor and display industry to give an impression of the variety of possibilities. We will present recent developments that push the limits of inkjet technology by more than an order of magnitude, both in terms of resolution and viscosity of the jetted materials.
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Michael Doran, Kai Keller, and Antonio Schmidt "Inkjet printing for additive manufacturing, semiconductors and other applications", Proc. SPIE PC12497, Novel Patterning Technologies 2023, PC1249702 (30 April 2023); https://doi.org/10.1117/12.2662917
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KEYWORDS
Inkjet technology
Printing
Semiconductors
Additive manufacturing
Semiconductor manufacturing
Materials processing
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