Metal-Optics Scatter Measurements

R. P. Young

doi:10.1117/12.954513

15 January 1976 Metal-Optics Scatter Measurements

R. P. Young

Proceedings Volume 0065, Design, Manufacture and Application of Metal Optics; (1976) https://doi.org/10.1117/12.954513
Event: 19th Annual Technical Symposium, 1975, San Diego, United States

Abstract

Many applications using metal optics require that the optical elements have very low scattering surfaces. A scatterometer suitable for measuring the scattering properties of metal mirror has been developed at AEDC. The scatterometer operates at two wavelengths, 0. 6328 and 10. 6 μm. Tests required to evaluate the performance of the scatterometer are described, and the directional scattering data off a high quality metal mirror are presented.

Citation Download Citation

R. P. Young "Metal-Optics Scatter Measurements", Proc. SPIE 0065, Design, Manufacture and Application of Metal Optics, (15 January 1976); https://doi.org/10.1117/12.954513

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available