Linnik Point Diffraction Interferometer Of Increased Sensitivity For The Measurement Of Wavefront Error

W. Harris; R. J. Speer; V. Stanley

doi:10.1117/12.958971

13 May 1981 Linnik Point Diffraction Interferometer Of Increased Sensitivity For The Measurement Of Wavefront Error

W. Harris, R. J. Speer, V. Stanley

Proceedings Volume 0235, Aspheric Optics: Design, Manufacture, Testing; (1981) https://doi.org/10.1117/12.958971
Event: Aspheric Optics: Design, Manufacture, Testing, 1980, London, United Kingdom

Abstract

The 1933 LINNIK Point Diffraction Interferometer continues to offer new possibilities in non-contacting aspheric grazing incidence mirror testing. In this work we demonstrate the wave-front aberration of a stigmatic Soft X-Ray reflecting optic recorded at progressively shorter wavelengths to a current limit of 313 nm yielding a twofold increase in sensitivity over previously reported measurements.

Citation Download Citation

W. Harris, R. J. Speer, and V. Stanley "Linnik Point Diffraction Interferometer Of Increased Sensitivity For The Measurement Of Wavefront Error", Proc. SPIE 0235, Aspheric Optics: Design, Manufacture, Testing, (13 May 1981); https://doi.org/10.1117/12.958971

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