Laser Spectroscopic Monitoring Of A Hydride Transport Vapor Phase Epitaxy (VPE) Reactor

R. F. Karlicek; V. M. Donnelly; W. D. Johnston Jr.

doi:10.1117/12.934277

15 September 1982 Laser Spectroscopic Monitoring Of A Hydride Transport Vapor Phase Epitaxy (VPE) Reactor

R. F. Karlicek, V. M. Donnelly, W. D. Johnston Jr.

Proceedings Volume 0323, Semiconductor Growth Technology; (1982) https://doi.org/10.1117/12.934277
Event: 1982 Los Angeles Technical Symposium, 1982, Los Angeles, United States

Abstract

Laser spectroscopy techniques have been demonstrated for monitoring of gas-phase reactants in a system designed to simulate a hydride transport vapor phase epitaxy (VPE) reactor used to grow InxGa1-xAsyP1-y. Using a single excitation wavelength, unique emissions characteristic of InCl,GaC1, P2, As2, As4, PH3, and AsH3 can be resolved under typical VPE conditions (700°-800°C, 1 atm total pressure) making this technique ideally suited for nonintrusive, real-time, simultaneous monitoring of these species during growth. Detection limits range from 10-5 to 10-8 atm, well below species concentrations typically expected under growth conditions (10-3 -10-4 atm). The details of this technique and some examples of its use in determining VPE growth conditions are presented.

Citation Download Citation

R. F. Karlicek, V. M. Donnelly, and W. D. Johnston Jr. "Laser Spectroscopic Monitoring Of A Hydride Transport Vapor Phase Epitaxy (VPE) Reactor", Proc. SPIE 0323, Semiconductor Growth Technology, (15 September 1982); https://doi.org/10.1117/12.934277

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