Infrared Ellipsometry

Thomas A. Leonard; Jack Stubbs; John S. Loomis

doi:10.1117/12.933298

29 April 1982 Infrared Ellipsometry

Thomas A. Leonard, Jack Stubbs, John S. Loomis

Proceedings Volume 0325, Optical Thin Films; (1982) https://doi.org/10.1117/12.933298
Event: 1982 Los Angeles Technical Symposium, 1982, Los Angeles, United States

Abstract

Expanding interest in infrared (IR) thin-film coatings is stimulating development of IR ellipsometers which can provide the optical constant measurements necessary to correctly design these coatings. Infrared ellipsometers are patterned after their visible counterparts; however, they suffer from a component limitation that is generally not a problem for visible instruments. Polarizers for use in the IR generally have low-contrast, limited-wavelength coverage, and beam distortion problems which limit the accuracy of IR ellipsometers. However, corrections can be made if the instrument is properly modeled. The complexity of these corrections and of ellipsometric calculations requires the use of a computer and associated codes. These instrument limitations and computer codes are discussed, and a state-of-the-art automated ellipsometer for use from 1 to 12 pm is described. Examples of measurements with this instrument show the precision attainable.

Citation Download Citation

Thomas A. Leonard, Jack Stubbs, and John S. Loomis "Infrared Ellipsometry", Proc. SPIE 0325, Optical Thin Films, (29 April 1982); https://doi.org/10.1117/12.933298

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