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For vacuum coating of optical surfaces a variety of new processes like ion assisted evaporation, cathode sputtering and plasma deposition have been added in the last years to the classical evaporation technique. The industrial development was concentrated mainly on automatic process control of evaporation, optical thickness control for roll coating and improvement of aging performance of optical layer systems by ion assisted coating techniques. Plasma deposition shows growing importance for IR applications, whereby microwave plasmas indicate interesting features.
Peter Sommerkamp
"Industrial Coating Technologies In Optics", Proc. SPIE 0381, Optical Surface Technology, (10 November 1983); https://doi.org/10.1117/12.934852
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Peter Sommerkamp, "Industrial Coating Technologies In Optics," Proc. SPIE 0381, Optical Surface Technology, (10 November 1983); https://doi.org/10.1117/12.934852