PROCEEDINGS VOLUME 0469
1984 MICROLITHOGRAPHY CONFERENCES | 12-16 MARCH 1984
Advances in Resist Technology I
Editor(s): C. Grant Willson
Editor Affiliations +
IN THIS VOLUME

1 Sessions, 24 Papers, 0 Presentations, 0 Posters
All Papers  (24)
1984 MICROLITHOGRAPHY CONFERENCES
12-16 March 1984
Santa Clara, United States
All Papers
M. P.C. Watts
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941770
D. Meyerhofer, L. K. White
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941771
Donald C. Hofer, Robert D. Miller, C.Grant Willson
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941772
C. H. Ting, K. L. Liauw
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941773
Yi-Ching Lin, Vic Marriott, Kevin Orvek, Gene Fuller
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941774
E. Reichmanis, G. Smolinsky
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941775
John S. Petersen, Alan E. Kozlowski
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941776
William D. Hinsberg, Monica L. Gutierrez
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941777
Vic Marriott, Yi -Ching Lin, Gene Fuller
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941778
Donald W. Johnson
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941779
William Salmre
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941780
Medhat A. Toukhy, Stephen F. Marcotte Jr.
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941781
B. F. Griffing, P. R. West, E. W. Balch
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941782
B. F. Griffing, W. E. Lorensen
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941783
Donald C. Hofer, Robert D. Miller, C.Grant Willson, Andrew R. Neureuther
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941784
Jer-Ming Yang, Kaolin Chiong, Hoh-Jiear Yan, Ming-Fea Chow
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941785
H. Hiraoka
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941786
Z. C.H Tan, R. C. Daly, S. S. Georgia
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941787
Y. M.N. Namaste, S. K. Obendorf, C. C. Anderson, F. Rodriguez
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941788
T. D. Berker
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941789
Medhat A Toukhy, Joe Jech Jr.
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941790
John J. Grunwald, Edwin J. Turner, David A. Sawoska, Eugene D. D'Ottavio, Allen C. Spencer
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941791
Satish K. Gupta, Carver G. Audain
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941792
Mary L. Long, Jeff Newman
Proceedings Volume Advances in Resist Technology I, (1984) https://doi.org/10.1117/12.941793
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