Linbo3 Optical Waveguide Fabrication By Ti Indiffusion And Proton Exchange: Process, Performances And Stability

C. Canali; A. Carnera; P. Mazzoldi; R. M. De La Rue

doi:10.1117/12.945147

29 January 1985 Linbo₃ Optical Waveguide Fabrication By Ti Indiffusion And Proton Exchange: Process, Performances And Stability

C. Canali, A. Carnera, P. Mazzoldi, R. M. De La Rue

Author Affiliations +

Proceedings Volume 0517, Integrated Optical Circuit Engineering I; (1985) https://doi.org/10.1117/12.945147
Event: 1984 Cambridge Symposium, 1984, Cambridge, United States

Abstract

Correlations between optical properties and structural modifications induced by the fabri cation procedures are reported for both Ti indiffused and proton exchanged LiNbO₃ waveguides. Surface roughness and structural defects account for the dependence of the propagation losses on the diffusion time in Ti:LiNbO₃ waveguides. The heavy lattice distortion induced by the high H concentration is related to the high in-plane scattering levels in proton exchang ed waveguides. Post annealing reduces lattice distortions and improves optical performances.

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C. Canali, A. Carnera, P. Mazzoldi, and R. M. De La Rue "Linbo₃ Optical Waveguide Fabrication By Ti Indiffusion And Proton Exchange: Process, Performances And Stability", Proc. SPIE 0517, Integrated Optical Circuit Engineering I, (29 January 1985); https://doi.org/10.1117/12.945147

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