Characterization Of Multilayered Structures For Soft X-Ray Mirrors

J. P. Chauvineau; J. Corno; D. Decanini; L. Nevot; B. Pardo

doi:10.1117/12.949673

6 May 1985 Characterization Of Multilayered Structures For Soft X-Ray Mirrors

J. P. Chauvineau, J. Corno, D. Decanini, L. Nevot, B. Pardo

Proceedings Volume 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics; (1985) https://doi.org/10.1117/12.949673
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

Three different experimental techniques are applied to the measurement of physical parameters involved in the determination of the optical performances of multilayers designed for soft X-ray mirrors. Geometrical parameterssuch as single layer thicknesses, multilayer period and interface roughness are evaluated by using soft X-ray reflectometry during the deposition process and grazing incidence X-ray reflectometry with the Cu K, radiation after the multilayer fabrication. The growth mechanism and surface composition of ultra-thin films constituting the multilayers are obtained by Auger electron spectroscopy performed during the layer deposition. The whole of these measurements is applied to elaborate a modelisa-tion of the real multilayers in view of their optical applications.

Citation Download Citation

J. P. Chauvineau, J. Corno, D. Decanini, L. Nevot, and B. Pardo "Characterization Of Multilayered Structures For Soft X-Ray Mirrors", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); https://doi.org/10.1117/12.949673

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