Analysis of Proton Exchanged Channel Waveguides in LiNbO[sub]3[/sub]

N. A . Sanford; W. E. Lee

doi:10.1117/12.950739

11 September 1985 Analysis of Proton Exchanged Channel Waveguides in LiNbO₃

N. A . Sanford, W. E. Lee

Author Affiliations +

Proceedings Volume 0578, Integrated Optical Circuit Engineering II; (1985) https://doi.org/10.1117/12.950739
Event: 1985 Cambridge Symposium, 1985, Cambridge, United States

Abstract

Channel waveguides fabricated by proton exchange in x-cut plates of LiNbO₃ have been examined using mode effective indices, secondary-ion mass spectroscopy (SIMS), and transmission electron microscopy (TEM). Effective indices measured over a wavelength range from 480 to 1320nm, and inverted with a step index approximation, reveals the dispersion of the proton exchanged layer. The index step,4Lne, depends also on the (Cr) diffusion aperture width used to define the channel; the surface One for 3-5/Am wide channels are 5-10% less than for those lOpm and wider for wavelengths above 632nm. Common 5 minute exchange times at 249C in pure benzoic acid were used throughout. Corroborative evidence, using SIMS, shows reduced Li depletion in narrower guides. Finally, TEM analysis of thinned waveguide samples strongly suggest instabilities observed in proton exchanged waveguides is primarily due to dehydration.

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N. A . Sanford and W. E. Lee "Analysis of Proton Exchanged Channel Waveguides in LiNbO₃", Proc. SPIE 0578, Integrated Optical Circuit Engineering II, (11 September 1985); https://doi.org/10.1117/12.950739

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