CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 0621 > Article
Paper
5 August 1986 Thickness Measurement Using Scanned Attenuated Total Reflection Technique
Jin-Chyuan Chen, Ding-Liang Chiao, Chien Chou
Author Affiliations +
Proceedings Volume 0621, Manufacturing Applications of Lasers; (1986) https://doi.org/10.1117/12.961157
Event: O-E/LASE'86 Symposium, 1986, Los Angeles, CA, United States
Abstract
An improved method for determining the thin film thickness in terms of the variation of reflectivity in Attenuated Total Reflection (ATR) is proposed. In which, the correlation of the difference of thin film thickness (1d) and reflectivity (R) is derived on the basis of Fresnel's formula. In addition, a scanning unit is specially designed to scan the laser beam and detector synchronously. Experimental results indicate that the measurement accuracy is not affected by small fluctuation of the incident angle and the reflectivity change. Moreover, possible applications of this technique in developing the displacement sensor with high sensitivity are also suggested.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Jin-Chyuan Chen, Ding-Liang Chiao, and Chien Chou "Thickness Measurement Using Scanned Attenuated Total Reflection Technique", Proc. SPIE 0621, Manufacturing Applications of Lasers, (5 August 1986); https://doi.org/10.1117/12.961157
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 6 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Reflectivity
Reflection
Prisms
Laser applications
Metals
Laser manufacturing
Manufacturing
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top