Optimization Of Technology For The Systems Of Hard-Oxide Layers By Spectroscopic Methods

K Fluck; G Szalai; J Kojnok; A Szasz

doi:10.1117/12.938394

13 October 1986 Optimization Of Technology For The Systems Of Hard-Oxide Layers By Spectroscopic Methods

K Fluck, G Szalai, J Kojnok, A Szasz

Proceedings Volume 0652, Thin Film Technologies II; (1986) https://doi.org/10.1117/12.938394
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

The well-known evaporating process of hard-oxid coatings for laser mirrors has many uncontrolled parameters. This paper deals with the Ti0,-SiO2 hard-oxides systems. The optimization of technology is based on optical [transmission; reflection parameters etc), spectroscopical [soft x-ray emission spectroscopy /SXES/, x-ray fluorescence spectroscopy /XFS/], structural (x-ray diffraction /XRD/) and damage threshold /DT/ examinations. The Ti02 was found in the evaporated layers in two equilibrium phases - rutil and anatase - depending on the evapora-tion conditions. The rutil phase was better than the anatase considering the DT for mirrors at λ=]1064 µm. The explanation is based on the difference of the near-infrared absorbtion between rutil and anatase phase of Ti0₂.

Citation Download Citation

K Fluck, G Szalai, J Kojnok, and A Szasz "Optimization Of Technology For The Systems Of Hard-Oxide Layers By Spectroscopic Methods", Proc. SPIE 0652, Thin Film Technologies II, (13 October 1986); https://doi.org/10.1117/12.938394

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available