Preparation Of Transparent Conducting Zinc Oxide Films By RF Reactive Sputtering

L Vasanelli; A Valentini; A Losacco

doi:10.1117/12.938319

24 September 1986 Preparation Of Transparent Conducting Zinc Oxide Films By RF Reactive Sputtering

L Vasanelli, A Valentini, A Losacco

Proceedings Volume 0653, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion V; (1986) https://doi.org/10.1117/12.938319
Event: 1986 International Symposium/Innsbruck, 1986, Innsbruck, Austria

Abstract

Transparent conducting zinc oxide films have been prepared by reactive sputtering in an Ar/H2 mixture. The optical and electrical properties of the films are presented and discussed. The effects of some post-deposition thermal treatment have been also investigated. ZnO/CdTe heterojunctions have .been prepared by sputtering ZnO films on CdTe single crystals. The photovoltaic conversion efficiencies of the obtained solar cells was 6.8%.

Citation Download Citation

L Vasanelli, A Valentini, and A Losacco "Preparation Of Transparent Conducting Zinc Oxide Films By RF Reactive Sputtering", Proc. SPIE 0653, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion V, (24 September 1986); https://doi.org/10.1117/12.938319

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