High Spatial Resolution Phase Measurements Of Optical Surfaces

Chris L. Koliopoulos; David S Anderson

doi:10.1117/12.939521

13 February 1987 High Spatial Resolution Phase Measurements Of Optical Surfaces

Chris L. Koliopoulos, David S Anderson

Proceedings Volume 0676, Ultraprecision Machining and Automated Fabrication of Optics; (1987) https://doi.org/10.1117/12.939521
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

The requirements on figure quality of large optics, particularly in the mid to high spatial frequen-cies have pushed beyond the limits of resolution of some common wavefront analysis methods such as the reduction of interferograms. The smoothness requirement for some large mirrors on spatial scales of a few centimeters can be on the order of 0.01 χ rms, making fabrication and testing of these mirrors difficult. The advent of direct phase measuring interferometry with the use of high density CCD or photodiode arrays can provide the means to achieve the needed spatial resolution.

Citation Download Citation

Chris L. Koliopoulos and David S Anderson "High Spatial Resolution Phase Measurements Of Optical Surfaces", Proc. SPIE 0676, Ultraprecision Machining and Automated Fabrication of Optics, (13 February 1987); https://doi.org/10.1117/12.939521

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