Near-Angle Scatter Measurement On Diamond-Turned Surfaces

H H Hurt; P A Temple; J M Bennett; D L Decker; V A Hodgkin

doi:10.1117/12.939529

13 February 1987 Near-Angle Scatter Measurement On Diamond-Turned Surfaces

H H Hurt, P A Temple, J M Bennett, D L Decker, V A Hodgkin

Proceedings Volume 0676, Ultraprecision Machining and Automated Fabrication of Optics; (1987) https://doi.org/10.1117/12.939529
Event: 30th Annual Technical Symposium, 1986, San Diego, United States

Abstract

The design and operation of a near-angle scatterometer that measures the total integrated scatter (TIS) from bare and coated diamond-turned surfaces are described. The scatterometer is designed to make TIS measurements from 0.06 out to 4 deg from the specular beam. Both bare and coated diamond-turned surfaces generated on two different machines were measured. The effect of machine control on minimizing near-angle scatter is discussed.

Citation Download Citation

H H Hurt, P A Temple, J M Bennett, D L Decker, and V A Hodgkin "Near-Angle Scatter Measurement On Diamond-Turned Surfaces", Proc. SPIE 0676, Ultraprecision Machining and Automated Fabrication of Optics, (13 February 1987); https://doi.org/10.1117/12.939529

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