18 May 1987Photoluminescence Imaging As A Technique To Control The Uniformity Of The Electronical Properties Of Semiconductor Surface During Device Fabrication
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It has been shown recently that integrated photoluminescence (PL) measurements can be used as a probe of the "electronical quality" of semiconductor surfaces and is perfectly well adapted to control individual steps in the processing of semiconductor devices based on InP.
C. Lallemand,M. Garrigues, andS. K. Krawczyk
"Photoluminescence Imaging As A Technique To Control The Uniformity Of The Electronical Properties Of Semiconductor Surface During Device Fabrication", Proc. SPIE 0702, International Topical Meeting on Image Detection and Quality, (18 May 1987); https://doi.org/10.1117/12.966783
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C. Lallemand, M. Garrigues, S. K. Krawczyk, "Photoluminescence Imaging As A Technique To Control The Uniformity Of The Electronical Properties Of Semiconductor Surface During Device Fabrication," Proc. SPIE 0702, International Topical Meeting on Image Detection and Quality, (18 May 1987); https://doi.org/10.1117/12.966783