Soft X-ray Radiometry

M. Kuhne

doi:10.1117/12.964948

1 January 1986 Soft X-ray Radiometry

M. Kuhne

Proceedings Volume 0733, Soft X-Ray Optics and Technology; (1986) https://doi.org/10.1117/12.964948
Event: Soft X-Ray Optics and Technology, 1987, Berlin, Germany

Abstract

For soft X-ray radiometry source and detector standards are required. The electron storage ring can serve as a primary source standard with an uncertainty in spectral radiant power of 2 %. Transfer source standards are being developed with uncertainties of 10 to 15 %. Ionization chamber, proportional counter and Si(Li)-detector can with limitations serve as primary detector standards. Radiant power determination with uncertainties of 3 to 6 % are achievable. Calibrated Al₂0₃ diodes are available as transfer detector standards for wavelengths > 5 nm with a calibration uncertainty of 10 %.

Citation Download Citation

M. Kuhne "Soft X-ray Radiometry", Proc. SPIE 0733, Soft X-Ray Optics and Technology, (1 January 1986); https://doi.org/10.1117/12.964948

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