XeCl Excimer Laser For Micro - Machining Of Materials: Preliminary Theoretical And Experimental Works.

Leszek Iwanejko; Ludwik Pokora; Miroslaw Stefanski; Zbigniew Ujda

doi:10.1117/12.943372

19 October 1987 XeCl Excimer Laser For Micro - Machining Of Materials: Preliminary Theoretical And Experimental Works.

Leszek Iwanejko, Ludwik Pokora, Miroslaw Stefanski, Zbigniew Ujda

Proceedings Volume 0859, Laser Technology II; (1987) https://doi.org/10.1117/12.943372
Event: Second Symposium on Laser Technology, 1987, Warsaw, Poland

Abstract

The paper presents the results of preliminary investigations, both theoretical and experimental, of XeC1 excimer laser pumped by transverse electric discharge with UU preionization. The medium was a mixture of gases He-Xe-HC1. A theoretical model of the XeC1 laser was worked out and a lot of laser parameters calculations were done. In the same time an excimer laser operating on the mixture He-Xe-HC1 was started, the generation of laser radiation was of energy about 20mJ.

Citation Download Citation

Leszek Iwanejko, Ludwik Pokora, Miroslaw Stefanski, and Zbigniew Ujda "XeCl Excimer Laser For Micro - Machining Of Materials: Preliminary Theoretical And Experimental Works.", Proc. SPIE 0859, Laser Technology II, (19 October 1987); https://doi.org/10.1117/12.943372

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