Automatic inspection for surface imperfections: requirements, potentials and limits

Ralph Neubecker; Jenny E. Hon

doi:10.1117/12.2235863

30 June 2016 Automatic inspection for surface imperfections: requirements, potentials and limits

Ralph Neubecker, Jenny E. Hon

Proceedings Volume 10009, Third European Seminar on Precision Optics Manufacturing; 1000907 (2016) https://doi.org/10.1117/12.2235863
Event: Third European Seminar on Precision Optics Manufacturing, 2016, Teisnach, Germany

Abstract

The inspection of optical elements for surface imperfections is mostly based on subjective evaluation by human operators. Automatic inspection systems (AIS) may introduce advantages in term of reliability, reproducibility and cycle time. The potential and limits of a camera-based, high-resolution AIS for scratches and digs are discussed. One important aspect is the illumination concept (brightfield or darkfield), regarded in relation to the scattering properties of an imperfection. Another aspect is the achievable spatial resolution of such a system. Different resolution limiting factors are considered, leading to criteria for the choice of digital sensors und imaging optics. Options to overcome a limited depth-of- field are also outlined. Next to technical aspects, the role of related standard specifications and system validations are addressed.

Citation Download Citation

Ralph Neubecker and Jenny E. Hon "Automatic inspection for surface imperfections: requirements, potentials and limits", Proc. SPIE 10009, Third European Seminar on Precision Optics Manufacturing, 1000907 (30 June 2016); https://doi.org/10.1117/12.2235863

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