Plasmonically enhanced 3D laser lithography for high-throughput nanoprecision fabrication

Linas Jonušauskas; Simonas Varapnickas; Gabrielius Rimšelis; Mangirdas Malinauskas

doi:10.1117/12.2249595

17 February 2017 Plasmonically enhanced 3D laser lithography for high-throughput nanoprecision fabrication

Linas Jonušauskas, Simonas Varapnickas, Gabrielius Rimšelis, Mangirdas Malinauskas

Proceedings Volume 10092, Laser-based Micro- and Nanoprocessing XI; 1009218 (2017) https://doi.org/10.1117/12.2249595
Event: SPIE LASE, 2017, San Francisco, California, United States

Abstract

Mixing of lithographically processable materials with functional additives is one of the widely explored possibilities in the field of the laser material processing. In this work we investigate how gold nanoparticles (Au NP) influence the photosensitivity of SZ2080 and PEG-DA-700 – two materials commonly used in femtosecond 3D direct laser writing (DLW). Experimental study of achieved line widths as well as comparison of polymerization/optical damage threshold intensities allowed quantitatively define how Au NP change polymers’ response to ultrafast laser pulses. Light-material and plasmonic interaction theories are applied to explain this phenomena. Furthermore, we demonstrate how nanoprecision achieved with DLW can be employed to create functional micromechanical structures, namely negative Poisson coefficient metamaterial and chain-mail like flexible structure. Later one is produced using combination of linear stages and galvanoscanners, demonstrating nearly unlimited working area (in range of ∼cm) and very high translation velocity (∼mm/s) thus proving that DLW can be considered an industrial grade technology.

Conference Presentation

Citation Download Citation

Linas Jonušauskas, Simonas Varapnickas, Gabrielius Rimšelis, and Mangirdas Malinauskas "Plasmonically enhanced 3D laser lithography for high-throughput nanoprecision fabrication", Proc. SPIE 10092, Laser-based Micro- and Nanoprocessing XI, 1009218 (17 February 2017); https://doi.org/10.1117/12.2249595

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