Laser nanolithography and pyrolysis of SZ2080 hybrid for slowing light in 3D photonic crystals

Darius Gailevicius; Linas Jonušauskas; Danas Sakalauskas; Zeki Hayran; Hamza Kurt; Mirbek Turduev; Simas Šakirzanovas; Saulius Juodkazis; Vygantas Mizeikis; Roaldas Gadonas; Kestutis Staliunas; Mangirdas Malinauskas

doi:10.1117/12.2250537

20 February 2017 Laser nanolithography and pyrolysis of SZ2080 hybrid for slowing light in 3D photonic crystals

Darius Gailevicius, Linas Jonušauskas, Danas Sakalauskas, Zeki Hayran, Hamza Kurt, Mirbek Turduev, Simas Šakirzanovas, Saulius Juodkazis, Vygantas Mizeikis, Roaldas Gadonas, Kestutis Staliunas, Mangirdas Malinauskas

Author Affiliations +

Proceedings Volume 10115, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X; 1011511 (2017) https://doi.org/10.1117/12.2250537
Event: SPIE OPTO, 2017, San Francisco, California, United States

Abstract

In this work we explore a possibility to apply ultrafast 3D laser nanolithography in conjunction with pyrolysis to acquire glass-ceramic 3D structures in micro- and nano-scale. Laser fabrication allows for production of initial 3D structures with relatively small (hundreds nm - μm) feature sizes out of SZ2080 hybrid material. Then, postfabrication heating at 600°C in Ar atmosphere decomposes organic part of the material leaving the glass-ceramic component of the hybrid. Resulting structures are uniformly shrunk by 40%. This brings us one step closer to fabricating highly efficient slow-light absorbers.

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Darius Gailevicius, Linas Jonušauskas, Danas Sakalauskas, Zeki Hayran, Hamza Kurt, Mirbek Turduev, Simas Šakirzanovas, Saulius Juodkazis, Vygantas Mizeikis, Roaldas Gadonas, Kestutis Staliunas, and Mangirdas Malinauskas "Laser nanolithography and pyrolysis of SZ2080 hybrid for slowing light in 3D photonic crystals", Proc. SPIE 10115, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X, 1011511 (20 February 2017); https://doi.org/10.1117/12.2250537

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