Fully Planar GaAs Waveguides By Spin-On Glass Zinc Diffusion

Y. Gigase; R. Baets; M. Belanger; S. I. Najafi

doi:10.1117/12.949406

5 April 1989 Fully Planar GaAs Waveguides By Spin-On Glass Zinc Diffusion

Y. Gigase, R. Baets, M. Belanger, S. I. Najafi

Author Affiliations +

Proceedings Volume 1014, Micro-Optics; (1989) https://doi.org/10.1117/12.949406
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

We present the details of a new fabrication technique for making planar waveguides in III-V semiconductors. Using this technique we made single mode totally planar waveguides in GaAs with measured propagation losses of 1.9 dB/cm.

Citation Download Citation

Y. Gigase, R. Baets, M. Belanger, and S. I. Najafi "Fully Planar GaAs Waveguides By Spin-On Glass Zinc Diffusion", Proc. SPIE 1014, Micro-Optics, (5 April 1989); https://doi.org/10.1117/12.949406

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE