Author Affiliations +
Honggoo Lee,1 Sangjun Han,1 Jaeson Woo,1 DongYoung Lee,1 ChangRock Song,1 Hoyoung Heo,2 Irina Brinster,2 DongSub Choi,3 John C. Robinson2
1SK Hynix, Inc. (Korea, Republic of)
2KLA-Tencor Corp. (United States)
3KLA-Tencor Korea (Korea, Republic of)