Precision Machining Of Coating Layers By Irradiation With A High Pulse Energy Excimer Laser

K. J. Schmatjko; H. Durchholz; G. Endres

doi:10.1117/12.950149

26 April 1989 Precision Machining Of Coating Layers By Irradiation With A High Pulse Energy Excimer Laser

K. J. Schmatjko, H. Durchholz, G. Endres

Proceedings Volume 1023, Excimer Lasers and Applications; (1989) https://doi.org/10.1117/12.950149
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

The structured removal of coatings by excimer laser irradiation was investigated for different coating/substrate systems. High structure quality and pm dimensions were attained for polymer coatings. Coating materials which melt under irradiation, show deterioration by melt flow, reactive or alloying action with the substrate, or limited wettability, which makes cleaning difficult. But in most cases the requirement of total removal can be met by the reduction of structure quality or machining speed.

Citation Download Citation

K. J. Schmatjko, H. Durchholz, and G. Endres "Precision Machining Of Coating Layers By Irradiation With A High Pulse Energy Excimer Laser", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); https://doi.org/10.1117/12.950149

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available