Simulation of the novel compact structure of an interferometric biosensor based on multimode interference waveguides

Moisi Xhoxhi; Alma Dudia; Aurel Ymeti

doi:10.1117/12.2265706

30 May 2017 Simulation of the novel compact structure of an interferometric biosensor based on multimode interference waveguides

Moisi Xhoxhi, Alma Dudia, Aurel Ymeti

Author Affiliations +

Proceedings Volume 10247, Bio-MEMS and Medical Microdevices III; 102470F (2017) https://doi.org/10.1117/12.2265706
Event: SPIE Microtechnologies, 2017, Barcelona, Spain

Abstract

We propose the novel structure of an interferometric biosensor based on multimode interference (MMI) waveguides. We present the design of the biosensor using eigenmode expansion (EME) method in accordance with the requirements and standards of today's photonic technology. The MMI structures with a 90 nm Si₃N₄ core are used as power splitters with 5 outputs. The 5 high-resolution images at the end of the multimode region show high power balance. We analyze the coupling efficiency of the laser source with the structure, the excess loss and power imbalance for different compact MMI waveguides with widths ranging from 45 μm to 15 μm. For a laser source with a tolerance of ±1mm in linearization we could achieve a coupling efficiency of 52%. MMI waveguides with tapered channels show excess loss values under 0.5 dB and power imbalance values under 0.08 dB. In addition, we show that for a 10 nm deviation of the source wavelength from its optimal value and for a 10 μm deviation of the MMI length from its optimal value, the performance of the MMI waveguides remains acceptable. Finally, we analyze the power budget of the whole biosensor structure and show that it is sufficient for the proper operation of this device.

Citation Download Citation

Moisi Xhoxhi, Alma Dudia, and Aurel Ymeti "Simulation of the novel compact structure of an interferometric biosensor based on multimode interference waveguides", Proc. SPIE 10247, Bio-MEMS and Medical Microdevices III, 102470F (30 May 2017); https://doi.org/10.1117/12.2265706

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