Thin film coatings for improved IR detector performance

J. Earl Rudisill; Hue Thi-Bach Nguyen

doi:10.1117/12.58693

1 January 1992 Thin film coatings for improved IR detector performance

J. Earl Rudisill, Hue Thi-Bach Nguyen

Proceedings Volume 10261, Infrared Thin Films: A Critical Review; 1026109 (1992) https://doi.org/10.1117/12.58693
Event: Critical Reviews, 1991, San Jose, CA, United States

Abstract

Gain enhancement from IR detectors could be realized if they were antireflection (AR) coated. The feasibility of AR coating silicon surfaces over the 6 to 11 micron and 11 to 17 micron bands has been demonstrated using single and double-layer coatings. The band averaged reflectance values were reduced from about 30% to about 4% with double-layer coatings. The actual spectral reflectance curves agreed very closely to the computer-modelled performances. Temperature and material-pair parameters were established that resulted in thermally durable combinations. The coated silicon was successfully cycled between room temperature and 77 degrees Kelvin. Application of this coating to Si:As Impurity Band Conduction detectors was successfully demonstrated in the 6 to 11 micron spectral band.

Citation Download Citation

J. Earl Rudisill and Hue Thi-Bach Nguyen "Thin film coatings for improved IR detector performance", Proc. SPIE 10261, Infrared Thin Films: A Critical Review, 1026109 (1 January 1992); https://doi.org/10.1117/12.58693

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