Plasma-enhanced CVD Of W and Mo oxides

D. K. Benson

doi:10.1117/12.2283616

28 March 1990 Plasma-enhanced CVD Of W and Mo oxides

D. K. Benson

Proceedings Volume 10304, Large-Area Chromogenics: Materials and Devices for Transmittance Control; 103040D (1990) https://doi.org/10.1117/12.2283616
Event: Institutes for Advanced Optical Technologies, 1989, Hamburg, Germany

Abstract

Recently a new technique for making electrochromic coatings has been presented. In the semiconductor industry, plasma enhanced chemical vapor deposition (PE-CVD) is routinely used to produce oxide and nitride coatings and photovoltaic a-Si devices . At the Solar Energy Research Institute the technique has now been developed to produce electrochromic coatings of tungsten and molybdenum oxidel-4 .The results are very promising and coatings show the same characteristics as tungsten and molybdenum oxides produced by evaporation. The main difference is that the coatings are produced at a much higher rate using PE-CVD. Deposition rates greater than 40 nm/s have been achieved for tungsten oxide. This points at the possibility to produce electrochromic devices at a more competitive price than with competing technologies.

Citation Download Citation

D. K. Benson "Plasma-enhanced CVD Of W and Mo oxides", Proc. SPIE 10304, Large-Area Chromogenics: Materials and Devices for Transmittance Control, 103040D (28 March 1990); https://doi.org/10.1117/12.2283616

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available