CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 10457 > Article
Paper
24 October 2017 A calibration method of capacitive displacement sensor based on laser interference
Dapeng Wang, Xing Jin, Nanlei Li, Weijing Zhou
Author Affiliations +
Proceedings Volume 10457, AOPC 2017: Laser Components, Systems, and Applications; 104570B (2017) https://doi.org/10.1117/12.2282149
Event: Applied Optics and Photonics China (AOPC2017), 2017, Beijing, China
Abstract
In order to meet the requirement of frequent in-situ calibration before micro-thrust measurement, a new calibration method based on laser interference is proposed. Based on common optical elements, the interference light path is set up, and the light path adjustment process is simplified by using the visible light of 532nm wavelength as the light source. The calibration principle is that the capacitive displacement sensor and laser interferometer simultaneously measure the movable pyramid prism’s position change resulted by adjusting displacement table, and the measurement result of laser interferometer is viewed as the reference displacement to carry on the sensor's calibration. By comparing with the sensor output, the method of calculating the number of fringes corresponding to optical path difference is analyzed. The practicability and accuracy of the calibration device is verified by experiment, and the calibration results and the relative error are analyzed at last.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Dapeng Wang, Xing Jin, Nanlei Li, and Weijing Zhou "A calibration method of capacitive displacement sensor based on laser interference", Proc. SPIE 10457, AOPC 2017: Laser Components, Systems, and Applications, 104570B (24 October 2017); https://doi.org/10.1117/12.2282149
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 5 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Calibration
Sensors
Sensor calibration
Laser interferometry
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top