To meet the requirements of high performances of linear guideway, an aerostatic lubrication model (ALM) with orifice restriction is put forward with finite difference method based on the bearing of slider block. With the combination of flux-error feedback and grids parameter optimization, the model is solved and the static behaviors of the bearing are obtained, and the bearing configurations, such as the diameter, number and position of the orifice are optimized. Finally, the performance test of the linear guideway is carried out, and the theoretical results have a good agreement with the experimental data. The actual stiffness and linearity of the system are 59N/μm and 0.3μm/255mm respectively. The conclusions are useful for the design and analysis of high precision aerostatic equipment.
|