Q-factor control of multilayer micromembrane using PZT composite material

Elingas Čekas; Giedrius Janušas; Arvydas Palevicius; Tomas Janušas; Justas Ciganas

doi:10.1117/12.2286618

19 February 2018 Q-factor control of multilayer micromembrane using PZT composite material

Elingas Čekas, Giedrius Janušas, Arvydas Palevicius, Tomas Janušas, Justas Ciganas

Proceedings Volume 10491, Microfluidics, BioMEMS, and Medical Microsystems XVI; 104910S (2018) https://doi.org/10.1117/12.2286618
Event: SPIE BiOS, 2018, San Francisco, California, United States

Abstract

Cantilever and membrane based sensors, which are capable of providing accurate detection of target analytes have been always an important research topic of medical diagnostics, food testing, and environmental monitoring fields. Here, the mechanical detection is achieved by micro- and nano-scale cantilevers for stress sensing and mass sensing, or micro- and nano-scale plates or membranes. High sensitivity is a major issue for the active element and it could be achieved via increased Q-factor. The ability to control the Q factor expands the range of application of the device and allows to achieve more accurate results. The aim of this paper is to investigate the mechanical and electrical properties, as well as, the ability to control the Q factor of the membrane with PZT nanocomposite. This multilayered membrane was formatted using the n-type <100> silicon substrate by implementing the Low Pressure Chemical Vapor Deposition (LPCVD), photolithography by using photomask with defined dimensions, deep etching, and e-beam evaporation techniques. Dynamic and electrical characteristics of the membrane were numerically investigated using COMSOL Multiphysics software. The use of the multilayered membrane can range from simple monitoring of particles concentration in a closed environment to inspecting glucose levels in human fluids (blood, tears, sweat, etc.).

Citation Download Citation

Elingas Čekas, Giedrius Janušas, Arvydas Palevicius, Tomas Janušas, and Justas Ciganas "Q-factor control of multilayer micromembrane using PZT composite material", Proc. SPIE 10491, Microfluidics, BioMEMS, and Medical Microsystems XVI, 104910S (19 February 2018); https://doi.org/10.1117/12.2286618

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KEYWORDS

Polymethylmethacrylate

Aluminum

Multilayers

Coating

Nanocomposites

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Microelectromechanical systems

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