For many applications in life sciences, the biologically relevant information is probed by means of visible light. Many of the critical optical components have, unfortunately, still a large footprint and heavy price tag. Silicon nitride integrated waveguide optics –allowing for complex routing schemes of visible light across a chip– assumes a promi-nent role in the progressing miniaturization of optical devices. However, in order to have the light in the chip interro-gate a distant biological entity, diffraction gratings have to be used to couple light out of the chip.
Ideally, all the light from a waveguide would be coupled out into a beam with a predefined polarization, phase, and intensity profile. As such they should be able to produce any functional beam that is typically prepared by free space optical components. For a standard, linear grating an exponential intensity decay is observed along the grating, i.e., more light is coupled out at the start than at the end.
Here, we present a specially designed metasurface that is able to deliver highly uniform illumination escaping the photonics chip in a collimated beam at a predesigned angle. Because of its integrated nature, a component like this is highly relevant for the miniaturization of, e.g., flow cytometry applications. We therefore include microfluidic chan-nels on top of the photonics chip and demonstrate the cytometric capabilities with fluorescent polystyrene beads. The opto-fluidic chips are processed in a CMOS pilot line. Our work demonstrates the potential of integrated visible pho-tonics and flat optics for life science applications.
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