The support structure of the mirror introduced in this paper is able to extremely reduce the surface shape distortion caused by the effects of support structure mostly. According to the simulating calculation, the variation of main mirror surface shape is no more than 0.001λ. The result is acceptable for camera adjustment. Based on the measurement support structure mentioned before, the main mirror could rotate 360-degree under the condition of optical axis horizontal; the four-direction measurement for mirror is achieved. Eliminate the effects of ground gravity for surface shape measurement data, the four-direction mirror shape error is controlled no more than 0.001λ on this support structure which calculated by simulation. |
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Mirrors
Teeth
Mirror structures
Cameras
Adhesives
Nanolithography
Numerical simulations